TY - GEN
T1 - All-polymer soft-X-ray-charged piezoelectret with embedded PEDOT electrode
AU - Feng, Yue
AU - Suzuki, Yuji
PY - 2013
Y1 - 2013
N2 - In this paper, we propose MEMS-based all-polymer piezoelectret for vibration-driven energy harvesting. With trench-filled cellular parylene electret charged with soft X-ray, output power of 75 nW has been obtained by the microfabricated piezoelectret energy harvester at the resonant frequency of 149 Hz and 1.5 g acceleration. We also propose an improved cellular polymer structure with embedded PEDOT electrodes for higher surface charge density and thus higher power output. We have successfully microfabricated an early prototype with embedded PEDOT and obtained high surface potential of -50 V, showing the effectiveness of embedded PEDOT electrodes.
AB - In this paper, we propose MEMS-based all-polymer piezoelectret for vibration-driven energy harvesting. With trench-filled cellular parylene electret charged with soft X-ray, output power of 75 nW has been obtained by the microfabricated piezoelectret energy harvester at the resonant frequency of 149 Hz and 1.5 g acceleration. We also propose an improved cellular polymer structure with embedded PEDOT electrodes for higher surface charge density and thus higher power output. We have successfully microfabricated an early prototype with embedded PEDOT and obtained high surface potential of -50 V, showing the effectiveness of embedded PEDOT electrodes.
UR - http://www.scopus.com/inward/record.url?scp=84875420898&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474380
DO - 10.1109/MEMSYS.2013.6474380
M3 - Conference contribution
AN - SCOPUS:84875420898
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 865
EP - 868
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -