Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

Clément Javerzac-Galy; Junqiu Liu; Arslan S. Raja; Tobias J. Kippenberg; Domenico De Fazio; Alisson Cadore; Ioannis Paradeisanos; Giancarlo Soavi; Gang Wang; Andrea C. Ferrari

doi:10.1364/FIO.2018.FW5E.5

Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

Clément Javerzac-Galy, Junqiu Liu, Arslan S. Raja, Tobias J. Kippenberg, Domenico De Fazio, Alisson Cadore, Ioannis Paradeisanos, Giancarlo Soavi, Gang Wang, Andrea C. Ferrari

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摘要

We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

源语言	英语
主期刊名	Frontiers in Optics, FIO 2018
出版商	Optica Publishing Group (formerly OSA)
ISBN（印刷版）	9781943580460
DOI	https://doi.org/10.1364/FIO.2018.FW5E.5
出版状态	已出版 - 2018
已对外发布	是
活动	Frontiers in Optics, FIO 2018 - Washington, DC, 美国期限: 16 9月 2018 → 20 9月 2018

出版系列

姓名	Optics InfoBase Conference Papers
卷	Part F114-FIO 2018
ISSN（电子版）	2162-2701

会议

会议	Frontiers in Optics, FIO 2018
国家/地区	美国
市	Washington, DC
时期	16/09/18 → 20/09/18

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10.1364/FIO.2018.FW5E.5

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Javerzac-Galy, C., Liu, J., Raja, A. S., Kippenberg, T. J., De Fazio, D., Cadore, A., Paradeisanos, I., Soavi, G., Wang, G., & Ferrari, A. C. (2018). Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range. 在 Frontiers in Optics, FIO 2018 (Optics InfoBase Conference Papers; 卷 Part F114-FIO 2018). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/FIO.2018.FW5E.5

@inproceedings{ebc22a17399643a885ed0900a0e2fbe4,

title = "Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range",

abstract = "We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.",

author = "Cl{\'e}ment Javerzac-Galy and Junqiu Liu and Raja, {Arslan S.} and Kippenberg, {Tobias J.} and {De Fazio}, Domenico and Alisson Cadore and Ioannis Paradeisanos and Giancarlo Soavi and Gang Wang and Ferrari, {Andrea C.}",

note = "Publisher Copyright: {\textcopyright} 2018 The Author(s).; Frontiers in Optics, FIO 2018 ; Conference date: 16-09-2018 Through 20-09-2018",

year = "2018",

doi = "10.1364/FIO.2018.FW5E.5",

language = "English",

isbn = "9781943580460",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Frontiers in Optics, FIO 2018",

address = "United States",

}

Javerzac-Galy, C, Liu, J, Raja, AS, Kippenberg, TJ, De Fazio, D, Cadore, A, Paradeisanos, I, Soavi, G, Wang, G & Ferrari, AC 2018, Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range. 在 Frontiers in Optics, FIO 2018. Optics InfoBase Conference Papers, 卷 Part F114-FIO 2018, Optica Publishing Group (formerly OSA), Frontiers in Optics, FIO 2018, Washington, DC, 美国, 16/09/18. https://doi.org/10.1364/FIO.2018.FW5E.5

Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range. / Javerzac-Galy, Clément; Liu, Junqiu; Raja, Arslan S. 等.
Frontiers in Optics, FIO 2018. Optica Publishing Group (formerly OSA), 2018. (Optics InfoBase Conference Papers; 卷 Part F114-FIO 2018).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

AU - Javerzac-Galy, Clément

AU - Liu, Junqiu

AU - Raja, Arslan S.

AU - Kippenberg, Tobias J.

AU - De Fazio, Domenico

AU - Cadore, Alisson

AU - Paradeisanos, Ioannis

AU - Soavi, Giancarlo

AU - Wang, Gang

AU - Ferrari, Andrea C.

PY - 2018

Y1 - 2018

N2 - We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

AB - We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

UR - http://www.scopus.com/inward/record.url?scp=85059388094&partnerID=8YFLogxK

U2 - 10.1364/FIO.2018.FW5E.5

DO - 10.1364/FIO.2018.FW5E.5

M3 - Conference contribution

AN - SCOPUS:85059388094

SN - 9781943580460

T3 - Optics InfoBase Conference Papers

BT - Frontiers in Optics, FIO 2018

PB - Optica Publishing Group (formerly OSA)

T2 - Frontiers in Optics, FIO 2018

Y2 - 16 September 2018 through 20 September 2018

ER -

Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

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