Aberration theory for wide electron beam focusing having curvilineal optical axis in electro-static and magnetic imaging systems

Weiqi Jin*, Liwei Zhou, Guoqiang Ni

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

Based on the generalized theory of wide electron beam focusing, an aberration theory for wide electron beam focusing with curvilineal optical axis in electrostatic and magnetic imaging systems has been studied using the rotational and non-orthogonal curvilineal coordinate systems. By defining the integration function, all aberration coefficients of the second-order geometrical aberration, the principal trajectory chromatic aberration and curvilineal paraxial trajectory chromatic aberration are given. The results of this paper have been shown to be convenient for analysis and computer processing.

源语言英语
页(从-至)271-277
页数7
期刊Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology
15
3
出版状态已出版 - 1995

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Jin, W., Zhou, L., & Ni, G. (1995). Aberration theory for wide electron beam focusing having curvilineal optical axis in electro-static and magnetic imaging systems. Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology, 15(3), 271-277.