A PZT MEMS loudspeaker with a quasi-closed diaphragm

Yifei Ma; Yao Lu; Ning Deng; Qincheng Zheng; Ke Cao; Haopu Wang; Huikai Xie

doi:10.1016/j.sna.2023.114454

A PZT MEMS loudspeaker with a quasi-closed diaphragm

Yifei Ma, Yao Lu^*, Ning Deng, Qincheng Zheng, Ke Cao, Haopu Wang, Huikai Xie

^*此作品的通讯作者

集成电路与电子学院

科研成果: 期刊稿件 › 文章 › 同行评审

5 引用（Scopus）

摘要

Piezoelectric MEMS speakers with non-closed diaphragms are promising to generate high sound pressure levels (SPLs), but a serious diaphragm breakage issue exists. In this work, a novel piezoelectric MEMS loudspeaker with a quasi-closed diaphragm is proposed. The quasi-closed diaphragm consists of a diagonally-cut but center-linked diaphragm, that is coated with a thin layer of Parylene-C. Under the combined action of the stress dispersion structure, the application of the Parylene-C film prevents the diaphragm from breakage and significantly reduces the air loss. The MEMS loudspeaker with a small size of 2.5 × 2.5 mm² has been successfully fabricated and the acoustic performance has been characterized in an 711 ear simulator. The measured SPL reaches its maximum value of 124 dB at 11.8 kHz under a drive voltage of 4 V_pp. The SPL is further increased to 88 dB in the low-frequency range (20–500 Hz) under a voltage of 35 V_pp.

源语言	英语
文章编号	114454
期刊	Sensors and Actuators A: Physical
卷	358
DOI	https://doi.org/10.1016/j.sna.2023.114454
出版状态	已出版 - 16 8月 2023

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title = "A PZT MEMS loudspeaker with a quasi-closed diaphragm",

abstract = "Piezoelectric MEMS speakers with non-closed diaphragms are promising to generate high sound pressure levels (SPLs), but a serious diaphragm breakage issue exists. In this work, a novel piezoelectric MEMS loudspeaker with a quasi-closed diaphragm is proposed. The quasi-closed diaphragm consists of a diagonally-cut but center-linked diaphragm, that is coated with a thin layer of Parylene-C. Under the combined action of the stress dispersion structure, the application of the Parylene-C film prevents the diaphragm from breakage and significantly reduces the air loss. The MEMS loudspeaker with a small size of 2.5 × 2.5 mm2 has been successfully fabricated and the acoustic performance has been characterized in an 711 ear simulator. The measured SPL reaches its maximum value of 124 dB at 11.8 kHz under a drive voltage of 4 Vpp. The SPL is further increased to 88 dB in the low-frequency range (20–500 Hz) under a voltage of 35 Vpp.",

keywords = "MEMS loudspeaker, PZT, Parylene-C, Piezoelectric, Quasi-closed diaphragm",

author = "Yifei Ma and Yao Lu and Ning Deng and Qincheng Zheng and Ke Cao and Haopu Wang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2023 Elsevier B.V.",

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doi = "10.1016/j.sna.2023.114454",

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T1 - A PZT MEMS loudspeaker with a quasi-closed diaphragm

AU - Ma, Yifei

AU - Lu, Yao

AU - Deng, Ning

AU - Zheng, Qincheng

AU - Cao, Ke

AU - Wang, Haopu

AU - Xie, Huikai

PY - 2023/8/16

Y1 - 2023/8/16

N2 - Piezoelectric MEMS speakers with non-closed diaphragms are promising to generate high sound pressure levels (SPLs), but a serious diaphragm breakage issue exists. In this work, a novel piezoelectric MEMS loudspeaker with a quasi-closed diaphragm is proposed. The quasi-closed diaphragm consists of a diagonally-cut but center-linked diaphragm, that is coated with a thin layer of Parylene-C. Under the combined action of the stress dispersion structure, the application of the Parylene-C film prevents the diaphragm from breakage and significantly reduces the air loss. The MEMS loudspeaker with a small size of 2.5 × 2.5 mm2 has been successfully fabricated and the acoustic performance has been characterized in an 711 ear simulator. The measured SPL reaches its maximum value of 124 dB at 11.8 kHz under a drive voltage of 4 Vpp. The SPL is further increased to 88 dB in the low-frequency range (20–500 Hz) under a voltage of 35 Vpp.

AB - Piezoelectric MEMS speakers with non-closed diaphragms are promising to generate high sound pressure levels (SPLs), but a serious diaphragm breakage issue exists. In this work, a novel piezoelectric MEMS loudspeaker with a quasi-closed diaphragm is proposed. The quasi-closed diaphragm consists of a diagonally-cut but center-linked diaphragm, that is coated with a thin layer of Parylene-C. Under the combined action of the stress dispersion structure, the application of the Parylene-C film prevents the diaphragm from breakage and significantly reduces the air loss. The MEMS loudspeaker with a small size of 2.5 × 2.5 mm2 has been successfully fabricated and the acoustic performance has been characterized in an 711 ear simulator. The measured SPL reaches its maximum value of 124 dB at 11.8 kHz under a drive voltage of 4 Vpp. The SPL is further increased to 88 dB in the low-frequency range (20–500 Hz) under a voltage of 35 Vpp.

KW - MEMS loudspeaker

KW - PZT

KW - Parylene-C

KW - Piezoelectric

KW - Quasi-closed diaphragm

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A PZT MEMS loudspeaker with a quasi-closed diaphragm

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