A Multi-Frequency pMUT Array Based on Ceramic PZT for Endoscopic Photoacoustic Imaging

Haoran Wang, Hao Yang, Huabei Jiang, Zhenfang Chen, Philip X.L. Feng, Huikai Xie

科研成果: 书/报告/会议事项章节会议稿件同行评审

11 引用 (Scopus)

摘要

This paper presents, for the first time, a multifrequency piezoelectric micromachined ultrasonic transducer (pMUT) array for endoscopic photoacoustic imaging applications. With a chip size of 3.5 × 3.5 mm2, the pMUT array consists of 285 pMUT elements with seven different resonant frequencies ranging from 1 MHz to 8 MHz. The pMUT array has been fabricated on a 9 m-thick layer of ceramic PZT with high piezoelectric constants. Mechanical vibration tests have shown high voltage-to-displacement gains, e.g., 130 nm/V, 35 nm/V, and 8 nm/V for the pMUT elements at their resonances of 1.2 MHz, 3.7 MHz, and 7.8 MHz, respectively. Ultrasound signals with frequencies from 300 kHz to 8 MHz have been successfully generated and detected by a pair of fabricated pMUT arrays. Furthermore, photoacoustic imaging experiments have been conducted, demonstrating the advantages of using multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high signal-to-noise ratio and high spatial resolution.

源语言英语
主期刊名21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
出版商Institute of Electrical and Electronics Engineers Inc.
30-33
页数4
ISBN(电子版)9781665412674
DOI
出版状态已出版 - 20 6月 2021
已对外发布
活动21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, 美国
期限: 20 6月 202125 6月 2021

出版系列

姓名21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

会议

会议21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
国家/地区美国
Virtual, Online
时期20/06/2125/06/21

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