TY - GEN
T1 - A Multi-Frequency pMUT Array Based on Ceramic PZT for Endoscopic Photoacoustic Imaging
AU - Wang, Haoran
AU - Yang, Hao
AU - Jiang, Huabei
AU - Chen, Zhenfang
AU - Feng, Philip X.L.
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - This paper presents, for the first time, a multifrequency piezoelectric micromachined ultrasonic transducer (pMUT) array for endoscopic photoacoustic imaging applications. With a chip size of 3.5 × 3.5 mm2, the pMUT array consists of 285 pMUT elements with seven different resonant frequencies ranging from 1 MHz to 8 MHz. The pMUT array has been fabricated on a 9 m-thick layer of ceramic PZT with high piezoelectric constants. Mechanical vibration tests have shown high voltage-to-displacement gains, e.g., 130 nm/V, 35 nm/V, and 8 nm/V for the pMUT elements at their resonances of 1.2 MHz, 3.7 MHz, and 7.8 MHz, respectively. Ultrasound signals with frequencies from 300 kHz to 8 MHz have been successfully generated and detected by a pair of fabricated pMUT arrays. Furthermore, photoacoustic imaging experiments have been conducted, demonstrating the advantages of using multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high signal-to-noise ratio and high spatial resolution.
AB - This paper presents, for the first time, a multifrequency piezoelectric micromachined ultrasonic transducer (pMUT) array for endoscopic photoacoustic imaging applications. With a chip size of 3.5 × 3.5 mm2, the pMUT array consists of 285 pMUT elements with seven different resonant frequencies ranging from 1 MHz to 8 MHz. The pMUT array has been fabricated on a 9 m-thick layer of ceramic PZT with high piezoelectric constants. Mechanical vibration tests have shown high voltage-to-displacement gains, e.g., 130 nm/V, 35 nm/V, and 8 nm/V for the pMUT elements at their resonances of 1.2 MHz, 3.7 MHz, and 7.8 MHz, respectively. Ultrasound signals with frequencies from 300 kHz to 8 MHz have been successfully generated and detected by a pair of fabricated pMUT arrays. Furthermore, photoacoustic imaging experiments have been conducted, demonstrating the advantages of using multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high signal-to-noise ratio and high spatial resolution.
KW - Piezoelectric micromachined ultrasonic transducer (pMUT)
KW - ceramic PZT
KW - multi-frequency
KW - pMUT array
KW - photoacoustic imaging
UR - http://www.scopus.com/inward/record.url?scp=85114964947&partnerID=8YFLogxK
U2 - 10.1109/Transducers50396.2021.9495717
DO - 10.1109/Transducers50396.2021.9495717
M3 - Conference contribution
AN - SCOPUS:85114964947
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 30
EP - 33
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Y2 - 20 June 2021 through 25 June 2021
ER -