@inproceedings{a0a7d36a6250498c904e23383dade2ce,
title = "A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface",
abstract = "We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7° for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm-1.",
keywords = "Bimorph, Electrothermal actuation, Fourier transform spectrometer, Large-vertical-displacement, MEMS mirror, Mirror-tilt-insensitive",
author = "L. Wu and A. Pais and Samuelson, {S. R.} and S. Guo and H. Xie",
year = "2009",
doi = "10.1109/SENSOR.2009.5285647",
language = "English",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "2090--2093",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}