A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

Xiaoyang Zhang; Liang Zhou; Huikai Xie

doi:10.1109/MEMSYS.2016.7421560

A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

Xiaoyang Zhang, Liang Zhou, Huikai Xie^*

^*此作品的通讯作者

University of Florida

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

8 引用（Scopus）

摘要

This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.

源语言	英语
主期刊名	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版商	Institute of Electrical and Electronics Engineers Inc.
页	71-74
页数	4
ISBN（电子版）	9781509019731
DOI	https://doi.org/10.1109/MEMSYS.2016.7421560
出版状态	已出版 - 26 2月 2016
已对外发布	是
活动	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, 中国期限: 24 1月 2016 → 28 1月 2016

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
卷	2016-February
ISSN（印刷版）	1084-6999

会议

会议	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
国家/地区	中国
市	Shanghai
时期	24/01/16 → 28/01/16

访问文件

10.1109/MEMSYS.2016.7421560

其它文件与链接

链接到 Scopus 的出版物

引用此

Zhang, X., Zhou, L., & Xie, H. (2016). A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. 在 MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (页码 71-74). 文章 7421560 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421560

Zhang, Xiaoyang ; Zhou, Liang ; Xie, Huikai. / A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. 页码 71-74 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{9a97650d5a2e4f87a3ff7c25c2a392e3,

title = "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives",

abstract = "This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.",

author = "Xiaoyang Zhang and Liang Zhou and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2016.7421560",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "71--74",

booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",

address = "United States",

}

Zhang, X, Zhou, L & Xie, H 2016, A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. 在 MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421560, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 卷 2016-February, Institute of Electrical and Electronics Engineers Inc., 页码 71-74, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, 中国, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421560

A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. / Zhang, Xiaoyang; Zhou, Liang; Xie, Huikai.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. 页码 71-74 7421560 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2016-February).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

AU - Zhang, Xiaoyang

AU - Zhou, Liang

AU - Xie, Huikai

PY - 2016/2/26

Y1 - 2016/2/26

N2 - This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.

AB - This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.

UR - http://www.scopus.com/inward/record.url?scp=84970974365&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2016.7421560

DO - 10.1109/MEMSYS.2016.7421560

M3 - Conference contribution

AN - SCOPUS:84970974365

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 71

EP - 74

BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

Y2 - 24 January 2016 through 28 January 2016

ER -

Zhang X, Zhou L, Xie H. A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. 在 MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. 页码 71-74. 7421560. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421560

A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

摘要

出版系列

会议

访问文件

其它文件与链接

指纹

引用此