摘要
Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.
源语言 | 英语 |
---|---|
文章编号 | 385706 |
期刊 | Nanotechnology |
卷 | 33 |
期 | 38 |
DOI | |
出版状态 | 已出版 - 17 9月 2022 |