A hybrid method for lattice image reconstruction and deformation analysis

Hongye Zhang*, Runlai Peng, Huihui Wen, Huimin Xie, Zhanwei Liu*

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

2 引用 (Scopus)

摘要

Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.

源语言英语
文章编号385706
期刊Nanotechnology
33
38
DOI
出版状态已出版 - 17 9月 2022

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