A data processing method based on tracking light spot for the laser differential confocal component parameters measurement system

Rongjun Shao, Lirong Qiu*, Jiamiao Yang, Weiqian Zhao, Xin Zhang

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

We have proposed the component parameters measuring method based on the differential confocal focusing theory. In order to improve the positioning precision of the laser differential confocal component parameters measurement system (LDDCPMS), the paper provides a data processing method based on tracking light spot. To reduce the error caused by the light point moving in collecting the axial intensity signal, the image centroiding algorithm is used to find and track the center of Airy disk of the images collected by the laser differential confocal system. For weakening the influence of higher harmonic noises during the measurement, Gaussian filter is used to process the axial intensity signal. Ultimately the zero point corresponding to the focus of the objective in a differential confocal system is achieved by linear fitting for the differential confocal axial intensity data. Preliminary experiments indicate that the method based on tracking light spot can accurately collect the axial intensity response signal of the virtual pinhole, and improve the anti-interference ability of system. Thus it improves the system positioning accuracy.

源语言英语
主期刊名2013 International Conference on Optical Instruments and Technology
主期刊副标题Optoelectronic Devices and Optical Signal Processing
出版商SPIE
ISBN(印刷版)9780819499615
DOI
出版状态已出版 - 2013
活动2013 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Optical Signal Processing - Beijing, 中国
期限: 17 11月 201319 11月 2013

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9043
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议2013 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Optical Signal Processing
国家/地区中国
Beijing
时期17/11/1319/11/13

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