A Compact Fourier Transform Spectrometer on a Silicon Optical Bench with an Electrothermal MEMS Mirror

Wei Wang; Jiapin Chen; Aleksandar S. Zivkovic; Quentin A.A. Tanguy; Huikai Xie

doi:10.1109/JMEMS.2016.2522767

A Compact Fourier Transform Spectrometer on a Silicon Optical Bench with an Electrothermal MEMS Mirror

Wei Wang, Jiapin Chen, Aleksandar S. Zivkovic, Quentin A.A. Tanguy, Huikai Xie

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摘要

This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm × 2 cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 μm, and the tilting of the mirror plate is reduced down to <±0.002° by using a new open-loop control method. A spectral resolution of 40 cm^-1, or 1.1 nm at 532 nm, has been achieved. The overall size of the system is reduced dramatically and the performance is improved significantly compared with the prior work.

源语言	英语
文章编号	7403847
页（从-至）	347-355
页数	9
期刊	Journal of Microelectromechanical Systems
卷	25
期	2
DOI	https://doi.org/10.1109/JMEMS.2016.2522767
出版状态	已出版 - 4月 2016
已对外发布	是

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Wang, W., Chen, J., Zivkovic, A. S., Tanguy, Q. A. A., & Xie, H. (2016). A Compact Fourier Transform Spectrometer on a Silicon Optical Bench with an Electrothermal MEMS Mirror. Journal of Microelectromechanical Systems, 25(2), 347-355. 文章 7403847. https://doi.org/10.1109/JMEMS.2016.2522767

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abstract = "This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm × 2 cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 μm, and the tilting of the mirror plate is reduced down to <±0.002° by using a new open-loop control method. A spectral resolution of 40 cm-1, or 1.1 nm at 532 nm, has been achieved. The overall size of the system is reduced dramatically and the performance is improved significantly compared with the prior work.",

keywords = "Fourier transform spectroscopy, electrothermal micromirror, microelectromechanical systems (MEMS), microspectrometer, open-loop control, silicon optical bench",

author = "Wei Wang and Jiapin Chen and Zivkovic, {Aleksandar S.} and Tanguy, {Quentin A.A.} and Huikai Xie",

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A Compact Fourier Transform Spectrometer on a Silicon Optical Bench with an Electrothermal MEMS Mirror

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