TY - GEN
T1 - 245 MHz graphene-aluminum nitride nano plate resonator
AU - Qian, Z.
AU - Hui, Y.
AU - Liu, F.
AU - Kar, S.
AU - Rinaldi, M.
PY - 2013
Y1 - 2013
N2 - This paper reports on the first demonstration of a high frequency (245 MHz) Graphene-Aluminum Nitride (G-AlN) nano plate resonator (NPR). For the first time, a two-dimensional (2D) electrically conductive graphene layer was integrated on top of an ultra-thin (500 nm) AlN nano plate and excited into a high frequency contour-extensional mode of vibration by piezoelectric transduction. Despite the reduced mass (43%) and volume (16%) and the increased sound velocity, hence resonant frequency (23%), of the G-AlN NPR, unchanged device figure of merit (kt2Q18) compared to the conventional AlN NPR was recorded, which demonstrates the great potential of the proposed technology for the implementation of a new class of ultra-sensitive and low noise G-AlN resonant sensors.
AB - This paper reports on the first demonstration of a high frequency (245 MHz) Graphene-Aluminum Nitride (G-AlN) nano plate resonator (NPR). For the first time, a two-dimensional (2D) electrically conductive graphene layer was integrated on top of an ultra-thin (500 nm) AlN nano plate and excited into a high frequency contour-extensional mode of vibration by piezoelectric transduction. Despite the reduced mass (43%) and volume (16%) and the increased sound velocity, hence resonant frequency (23%), of the G-AlN NPR, unchanged device figure of merit (kt2Q18) compared to the conventional AlN NPR was recorded, which demonstrates the great potential of the proposed technology for the implementation of a new class of ultra-sensitive and low noise G-AlN resonant sensors.
KW - Aluminum Nitride (AlN)
KW - Graphene
KW - MEMS
KW - NEMS
KW - Nano Plate Resonator
KW - Resonators
UR - http://www.scopus.com/inward/record.url?scp=84891715763&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6627190
DO - 10.1109/Transducers.2013.6627190
M3 - Conference contribution
AN - SCOPUS:84891715763
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 2005
EP - 2008
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -
