摘要
Based on the displacement amplification effect of lever, a capacitance detection micromachined gyroscope structure with a micro-lever structure was proposed. The designed lever amplification mechanism was set in the detection mode of the gyroscope, through which the detection displacement of Coriolis mass was amplified and transmitted to the detection frame to improve the detection displacement. The second-order vibration differential equation of lever-coupled micromachined gyroscope was established. The influence of lever on static stiffness and natural frequency of micro gyroscope was analyzed. The magnification effect of lever structure on the detection displacement under different structural conditions was investigated. The accuracy and feasibility of theoretical analysis was verified through simulation. The results showed that in the state of resonance, the displacement of detection frame can be effectively increased by more than 60%, the detection sensitivity is also improved effectively.
| 投稿的翻译标题 | Characteristic Analysis of Lever-coupled Micromachined Gyroscope |
|---|---|
| 源语言 | 繁体中文 |
| 页（从-至） | 118-122 |
| 页数 | 5 |
| 期刊 | Yadian Yu Shengguang/Piezoelectrics and Acoustooptics |
| 卷 | 42 |
| 期 | 1 |
| DOI | |
| 出版状态 | 已出版 - 1 2月 2020 |
关键词
- Damping ratio
- Displacement amplification
- Micro-lever
- Micromachined gyroscope
- Resonance