平板型电极微腔放电的特性

We emphatically investigated the discharge characteristics driven by direct-current (DC) voltage in micro-channel which consists of plate-to-plate electrodes separated by two parallel dielectric layers with micro-spacing. The breakdown voltages and current-voltage curves of the micro-channel structure in atmospheric air and nitrogen were measured by experiments, respectively. The experimental results show that, in both air and N₂, the breakdown voltage increases as the channel height (or the spacing between the two dielectric layers) changes from 90 to 20 μm. Moreover, we investigated the breakdown characteristics of micro-channel structure in nitrogen by PIC/MCC simulation. The results show that the accumulation of electrons on the dielectric layers plays the key role in the breakdown in micro-channels which makes the great reduction of electron density in the micro-channel. The smaller the channel height is, the much more the electrons lose on the dielectric surface when moving toward the anode, resulting in a higher breakdown voltage.