宽带高效聚焦的片上集成纳米透镜

As a basic optical element, optical lens is widely used for realizing the focusing, imaging and optical communication systems. Light of different wavelengths will propagate at different speeds. A beam of polychromatic light will produce chromatic dispersion after passing through a single optical device, which prevents the ordinary lenses from focusing the light of different wavelengths into a point. This means that the light of different wavelengths cannot be focused ideally. Traditional focusing systems can solve this problem by superimposing multiple lenses, but this is at the expense of increasing the complexity, weight, and cost of the system, and is not suitable for highly integrated nano-optical systems. At present, a better solution is to use the plane metalens, that is, using the metasurface to control the amplitude, phase and polarization at each point in space. However, the plane metalens is difficult to directly integrate on the chip. An intelligent algorithm developed by combining finite element method with genetic algorithm is used to optimize the design of multi-channel on-chip wavelength router devices and polarization router devices. In this paper, combining with years' research results of the theory of multiple scattering coherent superposition of disordered media, the use of intelligent algorithm to design an on-chip integrated nano-lens that can achieve efficient focusing from the visible to the near infrared band. In the lens structure SiO₂ serves as a substrate, and the arrangement structure of SiC rectangular column is designed. The substrate size is only 2 μm × 2 μm. The lens achieves low-dispersion focusing in the band from 470 nm to 1734 nm, with a focusing efficiency of over 55% at the highest level and 30% at the lowest level, and an average focusing efficiency of 42.1%. A 200-nm waveguide is added behind the focusing region. After refocusing through the waveguide, the laser beam with a size of 2 μm can be focused by the coupling of the lens and the waveguide into a beam below 200 nm in size. The focusing efficiency goes up to 80%. At the same time, the intelligent algorithm can be applied to different types of structures. The focusing lens structures composed of triangle, diamond, or circular nano columns are designed, which can achieve an approximate focusing effect and efficient coupling propagation efficiency. This work provides important ideas for developing broadband and efficient focusing nano-lens, as well as a new way to achieve the high-density integrated nanophotonic devices.