大范围分光瞳激光差动共焦显微快速定焦方法

Aiming at the problem that the axial scanning range and scanning speed cannot be taken into account in traditional confocal microscopy, a fast focusing method based on virtual pinhole detection for a large range of divided-aperture laser differential confocal microscopy is proposed. This method uses the principle of divided-aperture, combines the eccentric light beam and the virtual pinhole detection technology of divided-aperture, first uses the correspondence between the position of the laser spot on the CCD and the sample position to achieve a large range of rough focus, and then uses differential sensing virtual pinhole detection to realize high-precision fixed focus, thereby realizing fast focus identification in a large range. Experiments show that the axial resolution of this method can reach 10nm, the maximum sensing range can reach 70um, and the fixed focus speed is 3.6 times that of the traditional fixed focus method.