基于PSD的微摆镜角度自准直测试系统设计

The swing micro-mirror based on piezoelectric ceramics is a typical two-dimensional angle-driving component. In order to get the relationship between the control voltage and the deflection angle, the angle of the swing micro- mirror has to be measured. An autocllimator swing micro-mirror angle measurement system based on PSD is designed. The system is applied the theory of autocollimate. The twice 45° foldback system is adopted in order to reduce the volume of the system and solve the accurate build problem of traditional foldback system; Multilayer feedforward neural network is used to correct 2-D PSD nonlinear error. The measurement range is ±400" and the accuracy is 0.5" of the system after corrected. That can meet the application requirements of swing micro-mirror.