基于大面积TFT和PVDF薄膜的表面形貌无损探测技术

Fei Shang, Xiao Ran Hu, Qian Zhang, Shuai Liu, Yong Xiang*

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.

投稿的翻译标题Nondestructive Detection of Surface Morphology Based on Large-Area TFT and PVDF Films
源语言繁体中文
页(从-至)287-290
页数4
期刊Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China
49
2
DOI
出版状态已出版 - 30 3月 2020
已对外发布

关键词

  • PVDF
  • Sensor
  • Surface topography
  • TFT

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引用此

Shang, F., Hu, X. R., Zhang, Q., Liu, S., & Xiang, Y. (2020). 基于大面积TFT和PVDF薄膜的表面形貌无损探测技术. Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China, 49(2), 287-290. https://doi.org/10.12178/1001-0548.2019220