基于凸壳理论圆域拟合的球面面型精度测量方法

In order to solve the problem that a large number of discrete sampling points collected in the interferometry are not easy to find a unit circle for wavefront fitting. A method based on convex shell theory circular domain fitting is proposed. The method finds the minimum coverage circle for the acquired wavefront data, normalizes it to unit circle and perform Zernike wavefront fitting. Matlab is used to simulate the performance of the algorithm. After the measured data is processed and compared with the ZYGO test data, the absolute error of the PV value of the surface is 0.0047λ, and the absolute error of the RMS value is 0.0002λ. Experiments show that the algorithm can efficiently and accurately improve Zernike wavefront fitting on a large number of discrete wavefront data, which provides a reliable basis for the analysis of surface aberrations of optical components.