Wide-angle structured light with a scanning MEMS mirror in liquid

Xiaoyang Zhang; Sanjeev J. Koppal; Rui Zhang; Liang Zhou; Elizabeth Butler; Huikai Xie

doi:10.1364/OE.24.003479

Wide-angle structured light with a scanning MEMS mirror in liquid

Xiaoyang Zhang, Sanjeev J. Koppal, Rui Zhang, Liang Zhou, Elizabeth Butler, Huikai Xie

University of Florida

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°).We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.

Original language	English
Pages (from-to)	3479-3487
Number of pages	9
Journal	Optics Express
Volume	24
Issue number	4
DOIs	https://doi.org/10.1364/OE.24.003479
Publication status	Published - 22 Feb 2016
Externally published	Yes

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title = "Wide-angle structured light with a scanning MEMS mirror in liquid",

abstract = "Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a {"}Snell's window{"} effect and enables an enlarged FOV (≈ 150°).We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.",

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AU - Zhang, Xiaoyang

AU - Koppal, Sanjeev J.

AU - Zhang, Rui

AU - Zhou, Liang

AU - Butler, Elizabeth

AU - Xie, Huikai

PY - 2016/2/22

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N2 - Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°).We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.

AB - Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°).We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.

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Wide-angle structured light with a scanning MEMS mirror in liquid

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