Verification and test system technology for CMOS-MEMS switches

Liu Peng; Wenzhong Lou; Dai Ximing; Lu Yufei

doi:10.1109/NEMS.2015.7147497

Verification and test system technology for CMOS-MEMS switches

Liu Peng, Wenzhong Lou, Dai Ximing, Lu Yufei

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

Original language	English
Title of host publication	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	585-588
Number of pages	4
ISBN (Electronic)	9781467366953
DOIs	https://doi.org/10.1109/NEMS.2015.7147497
Publication status	Published - 1 Jul 2015
Event	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 - Xi'an, China Duration: 7 Apr 2015 → 11 Apr 2015

Publication series

Name	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

Conference

Conference	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Country/Territory	China
City	Xi'an
Period	7/04/15 → 11/04/15

Keywords

CMOS-MEMS Switch Microsystem
FPGA
Test Equipment System
Testing Algorithms

Access to Document

10.1109/NEMS.2015.7147497

Cite this

Peng, L., Lou, W., Ximing, D., & Yufei, L. (2015). Verification and test system technology for CMOS-MEMS switches. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 (pp. 585-588). Article 7147497 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2015.7147497

Peng, Liu ; Lou, Wenzhong ; Ximing, Dai et al. / Verification and test system technology for CMOS-MEMS switches. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 585-588 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

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title = "Verification and test system technology for CMOS-MEMS switches",

abstract = "A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.",

keywords = "CMOS-MEMS Switch Microsystem, FPGA, Test Equipment System, Testing Algorithms",

author = "Liu Peng and Wenzhong Lou and Dai Ximing and Lu Yufei",

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Peng, L, Lou, W, Ximing, D & Yufei, L 2015, Verification and test system technology for CMOS-MEMS switches. in 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015., 7147497, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 585-588, 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, 7/04/15. https://doi.org/10.1109/NEMS.2015.7147497

Verification and test system technology for CMOS-MEMS switches. / Peng, Liu; Lou, Wenzhong; Ximing, Dai et al.
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 585-588 7147497 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Verification and test system technology for CMOS-MEMS switches

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AU - Yufei, Lu

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N2 - A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

AB - A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

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KW - Testing Algorithms

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Peng L, Lou W, Ximing D, Yufei L. Verification and test system technology for CMOS-MEMS switches. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 585-588. 7147497. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). doi: 10.1109/NEMS.2015.7147497

Verification and test system technology for CMOS-MEMS switches

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