@inproceedings{1f8c218c49b94488b8b11f574d350788,
title = "Ultrafast Dynamics of Femtosecond Laser Irradiation of Silicon with Different Fluence",
abstract = "Due to the characteristics of ultrashort pulse duration and ultrahigh peak power of femtosecond laser, it is widely used in manufacturing industry. To monitor ultrafast dynamics during femtosecond laser-material interactions, ultrafast pump-probe spectroscopy with high spatiotemporal resolution has been used. However, single-crystalline silicon ablation combined with ultrafast electron dynamics and high spatial resolution is still understudied. In this study, we systematically investigated the process of femtosecond laser irradiation of single-crystalline silicon, revealing the mechanism of femtosecond laser processing of periodic structures. The formation of periodic ripples is explained by two mechanisms: direct interference of surface plasmons and incident laser, and grating-assisted coupling of surface plasmons with laser.",
keywords = "ablation mechanism, femtosecond laser irradiation, single-crystalline silicon, ultrafast pump-probe spectroscopy",
author = "Xu Wu and Jingya Sun",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; 3rd International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2023 ; Conference date: 26-05-2023 Through 28-05-2023",
year = "2023",
doi = "10.1117/12.2690764",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xiaotian Li and Costa, {Manuel Filipe}",
booktitle = "3rd International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2023",
address = "United States",
}