Ultrafast Dynamics of Femtosecond Laser Irradiation of Silicon with Different Fluence

Xu Wu, Jingya Sun*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Due to the characteristics of ultrashort pulse duration and ultrahigh peak power of femtosecond laser, it is widely used in manufacturing industry. To monitor ultrafast dynamics during femtosecond laser-material interactions, ultrafast pump-probe spectroscopy with high spatiotemporal resolution has been used. However, single-crystalline silicon ablation combined with ultrafast electron dynamics and high spatial resolution is still understudied. In this study, we systematically investigated the process of femtosecond laser irradiation of single-crystalline silicon, revealing the mechanism of femtosecond laser processing of periodic structures. The formation of periodic ripples is explained by two mechanisms: direct interference of surface plasmons and incident laser, and grating-assisted coupling of surface plasmons with laser.

Original languageEnglish
Title of host publication3rd International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2023
EditorsXiaotian Li, Manuel Filipe Costa
PublisherSPIE
ISBN (Electronic)9781510667624
DOIs
Publication statusPublished - 2023
Event3rd International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2023 - Kunming, China
Duration: 26 May 202328 May 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12757
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference3rd International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2023
Country/TerritoryChina
CityKunming
Period26/05/2328/05/23

Keywords

  • ablation mechanism
  • femtosecond laser irradiation
  • single-crystalline silicon
  • ultrafast pump-probe spectroscopy

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