Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

Wenjun Liao; Wenjing Liu; Yongming Tang; Baobing Wang; Huikai Xie

doi:10.1109/NEMS.2013.6559884

Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

Wenjun Liao^*, Wenjing Liu, Yongming Tang, Baobing Wang, Huikai Xie

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Citations (Scopus)

Abstract

This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis scan), 1250 Hz (y axis scan) and 19.2 kHz (fast y axis scan), respectively.

Original language	English
Title of host publication	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages	969-972
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2013.6559884
Publication status	Published - 2013
Externally published	Yes
Event	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China Duration: 7 Apr 2013 → 10 Apr 2013

Publication series

Name	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Conference

Conference	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Country/Territory	China
City	Suzhou
Period	7/04/13 → 10/04/13

Keywords

Folded Actuators
Micromirror
Piezoelectric
TTP

Access to Document

10.1109/NEMS.2013.6559884

Cite this

Liao, W., Liu, W., Tang, Y., Wang, B., & Xie, H. (2013). Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 969-972). Article 6559884 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559884

@inproceedings{3c2ab4ec069b4d85b86cf41eb50618e7,

title = "Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators",

abstract = "This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis scan), 1250 Hz (y axis scan) and 19.2 kHz (fast y axis scan), respectively.",

keywords = "Folded Actuators, Micromirror, Piezoelectric, TTP",

author = "Wenjun Liao and Wenjing Liu and Yongming Tang and Baobing Wang and Huikai Xie",

year = "2013",

doi = "10.1109/NEMS.2013.6559884",

language = "English",

isbn = "9781467363525",

series = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",

pages = "969--972",

booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",

note = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 ; Conference date: 07-04-2013 Through 10-04-2013",

}

Liao, W, Liu, W, Tang, Y, Wang, B & Xie, H 2013, Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559884, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, pp. 969-972, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, Suzhou, China, 7/04/13. https://doi.org/10.1109/NEMS.2013.6559884

Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators. / Liao, Wenjun; Liu, Wenjing; Tang, Yongming et al.
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 969-972 6559884 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

AU - Liao, Wenjun

AU - Liu, Wenjing

AU - Tang, Yongming

AU - Wang, Baobing

AU - Xie, Huikai

PY - 2013

Y1 - 2013

N2 - This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis scan), 1250 Hz (y axis scan) and 19.2 kHz (fast y axis scan), respectively.

AB - This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis scan), 1250 Hz (y axis scan) and 19.2 kHz (fast y axis scan), respectively.

KW - Folded Actuators

KW - Micromirror

KW - Piezoelectric

KW - TTP

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U2 - 10.1109/NEMS.2013.6559884

DO - 10.1109/NEMS.2013.6559884

M3 - Conference contribution

AN - SCOPUS:84883129923

SN - 9781467363525

T3 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

SP - 969

EP - 972

BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

T2 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Y2 - 7 April 2013 through 10 April 2013

ER -

Liao W, Liu W, Tang Y, Wang B, Xie H. Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 969-972. 6559884. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). doi: 10.1109/NEMS.2013.6559884

Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

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