@inproceedings{101711e246db486ca9d0c8e99f95700c,
title = "Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan",
abstract = "We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20°at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.",
keywords = "3D confocal microscopy, MEMS lens scanner, MEMS mirror, electrothermal",
author = "Lin Liu and Huikai Xie",
year = "2012",
doi = "10.1109/OMEMS.2012.6318851",
language = "English",
isbn = "9781457715112",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "158--159",
booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",
note = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",
}