Abstract
A new approach to calculate the temporal aberration coefficients of dynamic electron optical imaging systems is put forward in this paper. A new definition of temporal aberration is given in which a certain initial energy of electron emission along the axial direction εz1 (0 ≤ εz1 ≤ ε0max) as a criterion is considered. The new method for calculating the temporal aberration coefficients of dynamic electron optical imaging systems named 'direct integral method' is presented which gives new expressions of the temporary aberration coefficients expressed in integral form. The difference between 'direct integral method' and 'τ-variation method' is that the 'τ-variation method' needs to solve the differential equations for the three of temporal geometrical aberration coefficients of second order, while the 'direct integral method' needs only to carry out the integral calculation of them, which is more convenient and suitable for computation in the practical design.
Original language | English |
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Pages (from-to) | 3591-3596 |
Number of pages | 6 |
Journal | Wuli Xuebao/Acta Physica Sinica |
Volume | 54 |
Issue number | 8 |
Publication status | Published - Aug 2005 |
Keywords
- Cathode lenses
- Dynamic electron optics
- Electron optical imaging system
- Theory of temporal aberrations