Theoretical Calculation And Simulation Of Surface-Modified Scalable Silicon Heat Sink For Electronics Cooling

Yichi Zhang*, Shinichi Saito, Yoshishige Tsuchiya, Yeliang Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A surface-modified scalable heat sink that can be fabricated by applying silicon microfabrication technology has been proposed in this paper. Theoretical estima-tion of the heat sink thermal resistance is based on the heat sink with overall size of 1 cm × 1 cm × 1 cm, and four kinds of structure with various total number of grooves on the surface of fins have been investigated. Finite element analysis has been conducted by using COMSOL Multiphysics where fluid dynamics and heat transfer are taken into account. As a result, the lowest heat sinks thermal resis-tance of 6.84 °C per Watt is achieved for the structure with a larger fin area (13.1 cm2) and a higher inlet air flow rate (4 m/s), suggesting an optimum fin area depending on the air flow rate.

Original languageEnglish
Pages (from-to)4181-4187
Number of pages7
JournalThermal Science
Volume26
Issue number6 Part A
DOIs
Publication statusPublished - 2021

Keywords

  • silicon heat sinks
  • surface modification
  • thermal resistance

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