Abstract
A novel electromagnetic drive micromachined gyroscope based on meso-piezoresistive effect is proposed and the structure is designed. The method of electromagnetic drive is used, which achieves the requirement of low operating voltage, large driven force and great displacement. The sensitivity of gyroscope is increased essentially by using the meso-piezoresistive effect of resonant tunneling diodes. The modal simulation and path analysis is processed using the ANSYS software, which determines the natural frequencies and location of the resonant tunneling diodes. According to the present process technology, the process design of gyroscope is presented and the structure fabrication is achieved.
| Original language | English |
|---|---|
| Pages (from-to) | 647-650 |
| Number of pages | 4 |
| Journal | Chinese Journal of Sensors and Actuators |
| Volume | 23 |
| Issue number | 5 |
| Publication status | Published - May 2010 |
| Externally published | Yes |
Keywords
- Electromagnetic drive
- Meso-piezoresistive effect
- Micromachined gyroscope
- Structure design