TY - GEN
T1 - The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection
AU - Struk, Przemyslaw
AU - Bargiel, Sylwester
AU - Tanguy, Quentin A.A.
AU - Gorecki, Christophe
AU - Xie, Huikai
AU - Chutani, Ravinder
AU - Passilly, Nicolas
AU - Billard, Alain
N1 - Publisher Copyright:
© 2018. Downloading of the abstract is permitted for personal use only.
PY - 2018
Y1 - 2018
N2 - In this paper, we present the construction and preliminary experimental results of a MOEMS fiber-based integrated probe for endoscopic optical imaging of stomach tissue using a Swept-Source Optical Coherence Tomography (SSOCT). The probe consists of a Mirau micro-interferometer, combined with a GRIN lens collimator and a micromirror scanner. We describe the building blocks of the probe, especially the monolithically integrated Mirau mirointerferometer, fabricated by wafer-level vertical stacking and anodic bonding of Si/glass components, and the electrothermal 2-axis MEMS microscanner allowing large swept angles (up to ±22°) at high frequencies (> kHz) for low driving voltages (<20 V). The results of probe characterization, performed in a designed SS-OCT system, have confirmed proper operation of the probe. The B-scan images were obtained for central wavelength of λc = 840 nm, swept range of Dλ = 60 nm and A-scan frequency of fA= 110 kHz. The axial resolution of the probe is equal to 5.2 μm (determined by applied swept source), whereas the lateral resolution, measured by use of USAF test pattern, is 9.8 μm.
AB - In this paper, we present the construction and preliminary experimental results of a MOEMS fiber-based integrated probe for endoscopic optical imaging of stomach tissue using a Swept-Source Optical Coherence Tomography (SSOCT). The probe consists of a Mirau micro-interferometer, combined with a GRIN lens collimator and a micromirror scanner. We describe the building blocks of the probe, especially the monolithically integrated Mirau mirointerferometer, fabricated by wafer-level vertical stacking and anodic bonding of Si/glass components, and the electrothermal 2-axis MEMS microscanner allowing large swept angles (up to ±22°) at high frequencies (> kHz) for low driving voltages (<20 V). The results of probe characterization, performed in a designed SS-OCT system, have confirmed proper operation of the probe. The B-scan images were obtained for central wavelength of λc = 840 nm, swept range of Dλ = 60 nm and A-scan frequency of fA= 110 kHz. The axial resolution of the probe is equal to 5.2 μm (determined by applied swept source), whereas the lateral resolution, measured by use of USAF test pattern, is 9.8 μm.
KW - MOEMS Mirau micro-interferometer
KW - Optical imaging
KW - SS-OCT endomicroscopy probe
UR - http://www.scopus.com/inward/record.url?scp=85051204257&partnerID=8YFLogxK
U2 - 10.1117/12.2311298
DO - 10.1117/12.2311298
M3 - Conference contribution
AN - SCOPUS:85051204257
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Micro- and Nanometrology VII
A2 - Asundi, Anand Krishna
A2 - Osten, Wolfgang
A2 - Gorecki, Christophe
PB - SPIE
T2 - Optical Micro- and Nanometrology VII 2018
Y2 - 25 April 2018 through 26 April 2018
ER -
