The micro mechanical environment on the comb capacitive micro-machined gyroscope

Hai Peng Liu*, Shi Qiao Gao, Shaohua Niu, Lei Jin

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

With the in-depth researches on MEMS sensors, a lot of mechanical problems are encountered inevitably. Especially for the comb capacitive micro-machined gyroscope, a typical MEMS inertia sensor, the speciality of its structure and micro size determines the characteristics of the mechanical environment. With the reduction of structural size, the ratio of surface force and body force has increased clearly. Comparing with the roles of body force, the roles of surface force in MEMS sensors become more and more important. The micro forces, such as electrostatic force, Van de Waals force, capillary force and air-damping force were analyzed, and the action extent of these micro forces were obtained.

Original languageEnglish
Title of host publication2nd International Conference on Smart Materials and Nanotechnology in Engineering
DOIs
Publication statusPublished - 2009
Event2nd International Conference on Smart Materials and Nanotechnology in Engineering - Weihai, China
Duration: 8 Jul 200911 Jul 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7493
ISSN (Print)0277-786X

Conference

Conference2nd International Conference on Smart Materials and Nanotechnology in Engineering
Country/TerritoryChina
CityWeihai
Period8/07/0911/07/09

Keywords

  • Action extent
  • Comb structure
  • Mechanical environment
  • Micro forces

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