TY - GEN
T1 - The influence of package atmospheres on resonance performance of micromechanical radial-contour disk resonator
AU - Wang, Gang
AU - Xu, Lixin
PY - 2013
Y1 - 2013
N2 - Owing to high performance and tiny size, micromechanical radial-contour disk resonator as competitive candidate demonstrates an impressive prospect to replace traditional frequency selecting module in RF devices, so as to improve performance of modern RF transceivers. The influence of package atmospheres on resonance performance of micromechanical radial-contour disk resonator was investigated. By model construction and FEM calculation, resonance performance of micromechanical radial-contour disk resonator was analyzed, which indicate its resonance frequency as well as unique deformation style. In addition, effect on resonance performance of radial-contour disk resonator caused by package atmosphere was analyzed. The analysis result of resonance parameters variation of resonator immerged in different gases reveals that as the gas viscosity increases, the resonance frequency decreases. The phenomenon was interpreted by damping effect and recovery delay of disk deformation introduced by gases, which can be a reference for micromechanical resonator design and package selection in different applications.
AB - Owing to high performance and tiny size, micromechanical radial-contour disk resonator as competitive candidate demonstrates an impressive prospect to replace traditional frequency selecting module in RF devices, so as to improve performance of modern RF transceivers. The influence of package atmospheres on resonance performance of micromechanical radial-contour disk resonator was investigated. By model construction and FEM calculation, resonance performance of micromechanical radial-contour disk resonator was analyzed, which indicate its resonance frequency as well as unique deformation style. In addition, effect on resonance performance of radial-contour disk resonator caused by package atmosphere was analyzed. The analysis result of resonance parameters variation of resonator immerged in different gases reveals that as the gas viscosity increases, the resonance frequency decreases. The phenomenon was interpreted by damping effect and recovery delay of disk deformation introduced by gases, which can be a reference for micromechanical resonator design and package selection in different applications.
KW - MEMS packaging
KW - Micromechanical resonator
KW - Radial-contour
KW - Viscosity
UR - http://www.scopus.com/inward/record.url?scp=84880168251&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.709.503
DO - 10.4028/www.scientific.net/AMR.709.503
M3 - Conference contribution
AN - SCOPUS:84880168251
SN - 9783037857182
T3 - Advanced Materials Research
SP - 503
EP - 507
BT - Advances in Applied Science, Engineering and Technology
T2 - 2013 International Conference on Applied Science, Engineering and Technology, ICASET 2013
Y2 - 19 May 2013 through 21 May 2013
ER -