@inproceedings{529515a42b744f6ba13ba10769f4226f,
title = "The effect of casimir force to the performance of the micro-accelerometer",
abstract = "Casimir had measured the Casimir force through experimental methods, and fitted the empirical formula between the plates. On its basis we analyse that when the gap of two separating surfaces achieves submicron in micro devices, the effect of the Casimir force to the micro-devices is great and this Casimir effect can not be ignored. The results show that: Considering the Casimir force or not, the extreme value of acceleration which can be detected by micro-accelerometer is different, and we have got the specific numerical fitting figure by Matlab .",
keywords = "Casimir force, Micro-accelerometer",
author = "Li Shen and Shiqiao Gao and Yanwei Guan",
year = "2013",
doi = "10.4028/www.scientific.net/KEM.562-565.247",
language = "English",
isbn = "9783037857397",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd.",
pages = "247--250",
booktitle = "Micro-Nano Technology XIV",
address = "Switzerland",
note = "14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 ; Conference date: 04-11-2012 Through 07-11-2012",
}