The development of a dual-warhead impact system for dynamic linearity measurement of a high-g micro-electro-mechanical-systems (MEMS) accelerometer

Yunbo Shi, Zhicai Yang, Zongmin Ma*, Huiliang Cao, Zhiwei Kou, Dan Zhi, Yanxiang Chen, Hengzhen Feng, Jun Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.

Original languageEnglish
JournalSensors
Volume16
Issue number6
DOIs
Publication statusPublished - 8 Jun 2016
Externally publishedYes

Keywords

  • Accelerometer
  • Dual-warhead Hopkinson bar
  • Dynamic linearity
  • Laser interferometer
  • Measurement

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