TY - GEN
T1 - The centering and leveling adjustment and control technology for the ultra-precision turntable
AU - Tian, Yanrong
AU - Wang, Yun
AU - Wang, Longxiao
AU - Zhao, Weirui
N1 - Publisher Copyright:
© COPYRIGHT 2015 SPIE.
PY - 2015
Y1 - 2015
N2 - In order to realize the centering and leveling adjustment in large aperture spherical and aspheric surface shape measurement, by combining with the aerostatic bearing rotary shaft, working platform, high performance servo motor, photoelectric encoder, the micro displacement actuator of XYZ axis, sensor and Renishaw circular grating,a set of fast and ultra-precision centering and leveling adjustment system is developed.The system is based on large range of air lubrication technology for high precision aerostatic bearing turntable, using the principle of three point supporting method, and the driving of tens nanometer resolution are provided by a piezoelectric micro displacement actuator. To realize the automatical centering and leveling adjustment in the large aperture spherical and aspheric surface shape measurement system, a software control program is designed with VC++. Through experimental test: centering adjusting operation can eventually converges to 0.5μm, leveling adjusting operation can eventually converges to 0.2, the time of adjusting can be less than 120 s. The experimental results shows that, compared with the previous system, the structure of the developed measurement and control system is more simple, more flexible, it can meet the demands of high precision, high resolution, large adjusting range, no friction, easy to drive, and high bearing stiffness etc in eccentric adjusting operation of optical precision measurement well.
AB - In order to realize the centering and leveling adjustment in large aperture spherical and aspheric surface shape measurement, by combining with the aerostatic bearing rotary shaft, working platform, high performance servo motor, photoelectric encoder, the micro displacement actuator of XYZ axis, sensor and Renishaw circular grating,a set of fast and ultra-precision centering and leveling adjustment system is developed.The system is based on large range of air lubrication technology for high precision aerostatic bearing turntable, using the principle of three point supporting method, and the driving of tens nanometer resolution are provided by a piezoelectric micro displacement actuator. To realize the automatical centering and leveling adjustment in the large aperture spherical and aspheric surface shape measurement system, a software control program is designed with VC++. Through experimental test: centering adjusting operation can eventually converges to 0.5μm, leveling adjusting operation can eventually converges to 0.2, the time of adjusting can be less than 120 s. The experimental results shows that, compared with the previous system, the structure of the developed measurement and control system is more simple, more flexible, it can meet the demands of high precision, high resolution, large adjusting range, no friction, easy to drive, and high bearing stiffness etc in eccentric adjusting operation of optical precision measurement well.
KW - Aerostatic bearing
KW - Aspheric surface measurement
KW - Centering adjustment
KW - Leveling adjustment
KW - Turntable
UR - http://www.scopus.com/inward/record.url?scp=84943372600&partnerID=8YFLogxK
U2 - 10.1117/12.2197530
DO - 10.1117/12.2197530
M3 - Conference contribution
AN - SCOPUS:84943372600
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 2015 International Conference on Optical Instruments and Technology
A2 - Tatsuno, Kimio
A2 - Tan, Xiaodi
A2 - Wang, Yongtian
PB - SPIE
T2 - 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, OIT 2015
Y2 - 17 May 2015 through 19 May 2015
ER -