Technique of nano-grating fabricated by AFM

On the basis of micro-fabrication technique using the atomic force microscope, a new method was proposed for producing high frequency grating. The grating was fabricated on compact disc (polycarbonate) with silicon AFM tip under the contact mode. The fabrication technique was discussed. The experimental parameters were optimized. A grating of nanostructure was formed. Because of further application, the formed grating is involved with digital grating to form digital moire. The grating can be used in deformation measurement of objects in nano-deformation.