Abstract
Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanoneedles (PZT-ZnOn) were successfully prepared on Pt/Cr/SiO2/Si substrates by the hybrid sol-gel method via spin-coating ZnOn suspension and lead zirconate titanate (PZT) sol. To control the orientation of the films, a PbTiO3 (PT) layer was first deposited as a seed layer. Effects of annealing method and ZnOn contents on the corresponding orientation and crystallization of PZT-ZnO n films were investigated by XRD and SEM. The results show that all the PZT-ZnOn composite thick films have pure perovskite structure and high-quality film surface. The dielectric and ferroelectric properties of the PZT-ZnOn films are close to the PZT films, and have a little decrease with the increasing of the ZnOn contents.
Original language | English |
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Pages (from-to) | 2521-2526 |
Number of pages | 6 |
Journal | Journal of Materials Science: Materials in Electronics |
Volume | 24 |
Issue number | 7 |
DOIs | |
Publication status | Published - Jul 2013 |