Synthesis and electrical properties of Pb(Zr0.52Ti 0.48)O3 thick films embedded with ZnO nanoneedles prepared by the hybrid sol-gel method

Ran Lu, Jie Yuan*, Bin Li, Yong Li, Quan Liang Zhao, Mao Sheng Cao

*Corresponding author for this work

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Abstract

Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanoneedles (PZT-ZnOn) were successfully prepared on Pt/Cr/SiO2/Si substrates by the hybrid sol-gel method via spin-coating ZnOn suspension and lead zirconate titanate (PZT) sol. To control the orientation of the films, a PbTiO3 (PT) layer was first deposited as a seed layer. Effects of annealing method and ZnOn contents on the corresponding orientation and crystallization of PZT-ZnO n films were investigated by XRD and SEM. The results show that all the PZT-ZnOn composite thick films have pure perovskite structure and high-quality film surface. The dielectric and ferroelectric properties of the PZT-ZnOn films are close to the PZT films, and have a little decrease with the increasing of the ZnOn contents.

Original languageEnglish
Pages (from-to)2521-2526
Number of pages6
JournalJournal of Materials Science: Materials in Electronics
Volume24
Issue number7
DOIs
Publication statusPublished - Jul 2013

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Lu, R., Yuan, J., Li, B., Li, Y., Zhao, Q. L., & Cao, M. S. (2013). Synthesis and electrical properties of Pb(Zr0.52Ti 0.48)O3 thick films embedded with ZnO nanoneedles prepared by the hybrid sol-gel method. Journal of Materials Science: Materials in Electronics, 24(7), 2521-2526. https://doi.org/10.1007/s10854-013-1127-0