Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses

Iaroslav Gnilitskyi; Vitaly Gruzdev; Xiaoqing He; Olga Sergaeva; Pengfei Ji; Tommi White; Yuwen Zhang

doi:10.1364/cleopr.2018.w4b.3

Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses

Iaroslav Gnilitskyi, Vitaly Gruzdev, Xiaoqing He, Olga Sergaeva, Pengfei Ji, Tommi White, Yuwen Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580453
DOIs	https://doi.org/10.1364/cleopr.2018.w4b.3
Publication status	Published - 2018
Externally published	Yes
Event	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018 - Hong Kong, China Duration: 29 Jul 2018 → 3 Aug 2018

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F113-CLEOPR 2018
ISSN (Electronic)	2162-2701

Conference

Conference	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018
Country/Territory	China
City	Hong Kong
Period	29/07/18 → 3/08/18

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10.1364/cleopr.2018.w4b.3

Cite this

Gnilitskyi, I., Gruzdev, V., He, X., Sergaeva, O., Ji, P., White, T., & Zhang, Y. (2018). Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018 (Optics InfoBase Conference Papers; Vol. Part F113-CLEOPR 2018). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/cleopr.2018.w4b.3

@inproceedings{c04fe12ca0e14cb599fbd28e3531ba4b,

title = "Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses",

abstract = "Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.",

author = "Iaroslav Gnilitskyi and Vitaly Gruzdev and Xiaoqing He and Olga Sergaeva and Pengfei Ji and Tommi White and Yuwen Zhang",

note = "Publisher Copyright: {\textcopyright} OSA 2018; Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018 ; Conference date: 29-07-2018 Through 03-08-2018",

year = "2018",

doi = "10.1364/cleopr.2018.w4b.3",

language = "English",

isbn = "9781943580453",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018",

address = "United States",

}

Gnilitskyi, I, Gruzdev, V, He, X, Sergaeva, O, Ji, P, White, T & Zhang, Y 2018, Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018. Optics InfoBase Conference Papers, vol. Part F113-CLEOPR 2018, Optica Publishing Group (formerly OSA), Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018, Hong Kong, China, 29/07/18. https://doi.org/10.1364/cleopr.2018.w4b.3

Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses. / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; He, Xiaoqing et al.
Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018. Optica Publishing Group (formerly OSA), 2018. (Optics InfoBase Conference Papers; Vol. Part F113-CLEOPR 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses

AU - Gnilitskyi, Iaroslav

AU - Gruzdev, Vitaly

AU - He, Xiaoqing

AU - Sergaeva, Olga

AU - Ji, Pengfei

AU - White, Tommi

AU - Zhang, Yuwen

PY - 2018

Y1 - 2018

N2 - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

AB - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

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U2 - 10.1364/cleopr.2018.w4b.3

DO - 10.1364/cleopr.2018.w4b.3

M3 - Conference contribution

AN - SCOPUS:85059408578

SN - 9781943580453

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018

PB - Optica Publishing Group (formerly OSA)

T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018

Y2 - 29 July 2018 through 3 August 2018

ER -

Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses

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