@inproceedings{1e2eb9659bde4737ad4900d13720d146,
title = "Study on effect of van der Waals force and Casimir force to microsystem",
abstract = "Based on the electrostatic comb drive structure, the comb will do relative motionwhen it is driven up,and the space between them will be less than 1μm. Considering the micro-scale effect, the Van der Waals force and the Casimir force is usedto analyze the influence on the micro-structure, compared with theelectrostatic force.Thevan der Waals force and theCasimir force is almost equivalent to the electrostatic forcewhen the initial gapof the micro-structure and the relative displacement between the micro-structureis relatively small.Therefore the van der Waals force and the Casimir force playan important role in the micro-structure and cannot be ignored.",
keywords = "Casimir force, van der Waals force",
author = "Guan, {Yan Wei} and Gao, {Shi Qiao} and Li Shen and He, {Yun Li}",
year = "2013",
doi = "10.4028/www.scientific.net/AMM.336-338.944",
language = "English",
isbn = "9783037857519",
series = "Applied Mechanics and Materials",
pages = "944--948",
booktitle = "Industrial Instrumentation and Control Systems II",
note = "2013 2nd International Conference on Measurement, Instrumentation and Automation, ICMIA 2013 ; Conference date: 23-04-2013 Through 24-04-2013",
}