TY - GEN
T1 - Study on dynamic characteristic of bipolar decoupling micro-machined gyroscope
AU - Shi, Jitao
AU - Gao, Shiqiao
AU - Zheng, Yuelei
PY - 2012
Y1 - 2012
N2 - The micro-machined gyroscope was manufactured through CETC13 SOG process and packaged with ceramic DIP-24 at vacuum pressure. In this paper, the bipolar decoupling micromachined models were analyzed, the drive and test mode frequency at atmospheric pressure were tested, the scale factor and the output noise were mensurated. The results showed that the high linearity micro-gyroscope had achieved high linearity and good dynamic character at atmospheric pressure.
AB - The micro-machined gyroscope was manufactured through CETC13 SOG process and packaged with ceramic DIP-24 at vacuum pressure. In this paper, the bipolar decoupling micromachined models were analyzed, the drive and test mode frequency at atmospheric pressure were tested, the scale factor and the output noise were mensurated. The results showed that the high linearity micro-gyroscope had achieved high linearity and good dynamic character at atmospheric pressure.
KW - Dynamic character test
KW - High linearity
KW - Micro-machined gyroscope
UR - http://www.scopus.com/inward/record.url?scp=84862951498&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.443-444.980
DO - 10.4028/www.scientific.net/AMR.443-444.980
M3 - Conference contribution
AN - SCOPUS:84862951498
SN - 9783037852897
T3 - Advanced Materials Research
SP - 980
EP - 985
BT - Manufacturing Science and Materials Engineering
T2 - 2010 International Conference on Manufacturing Science and Materials Engineering, ICMSME 2011
Y2 - 14 October 2011 through 15 October 2011
ER -