Abstract
The micro-machined gyroscope was manufactured through CETC13 SOG process and packaged with ceramic DIP-24 at vacuum pressure. In this paper, the bipolar decoupling micromachined models were analyzed, the drive and test mode frequency at atmospheric pressure were tested, the scale factor and the output noise were mensurated. The results showed that the high linearity micro-gyroscope had achieved high linearity and good dynamic character at atmospheric pressure.
| Original language | English |
|---|---|
| Title of host publication | Manufacturing Science and Materials Engineering |
| Pages | 980-985 |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - 2012 |
| Event | 2010 International Conference on Manufacturing Science and Materials Engineering, ICMSME 2011 - Shanghai, China Duration: 14 Oct 2011 → 15 Oct 2011 |
Publication series
| Name | Advanced Materials Research |
|---|---|
| Volume | 443-444 |
| ISSN (Print) | 1022-6680 |
Conference
| Conference | 2010 International Conference on Manufacturing Science and Materials Engineering, ICMSME 2011 |
|---|---|
| Country/Territory | China |
| City | Shanghai |
| Period | 14/10/11 → 15/10/11 |
Keywords
- Dynamic character test
- High linearity
- Micro-machined gyroscope
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Shi, J., Gao, S., & Zheng, Y. (2012). Study on dynamic characteristic of bipolar decoupling micro-machined gyroscope. In Manufacturing Science and Materials Engineering (pp. 980-985). (Advanced Materials Research; Vol. 443-444). https://doi.org/10.4028/www.scientific.net/AMR.443-444.980