Study of nano-PZT thick film for MEMS application

Hongmei Liu; Chengjun Qiu; Deqing Zhang; Huijun Zhang; Maosheng Cao

Study of nano-PZT thick film for MEMS application

Hongmei Liu, Chengjun Qiu, Deqing Zhang, Huijun Zhang, Maosheng Cao^*

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A novel spin-coating route for fabricating PZT thick films was proposed. By 0-3 composite method, PZT Sol-Gel precursor and nano-sized powders were mixed to form homogenous slurry. PZT Sol-Gel precursor and the slurry were alternately spin-coated on the Pt/Ti/SiO₂/Si substrate and the crack free PZT thick films (2 μm in thickenss) wre prepared successfully. Finally, the organizing and structure of PZT thick films were characterized by means of XRD and SEM in detail.

Original language	English
Pages (from-to)	606-609
Number of pages	4
Journal	Gaojishu Tongxin/High Technology Letters
Volume	16
Issue number	6
Publication status	Published - Jun 2006

Keywords

MEMS
Nano-PZT
Thick films

Cite this

@article{bc2169365eee4587b61090d5b15b39e5,

title = "Study of nano-PZT thick film for MEMS application",

abstract = "A novel spin-coating route for fabricating PZT thick films was proposed. By 0-3 composite method, PZT Sol-Gel precursor and nano-sized powders were mixed to form homogenous slurry. PZT Sol-Gel precursor and the slurry were alternately spin-coated on the Pt/Ti/SiO2/Si substrate and the crack free PZT thick films (2 μm in thickenss) wre prepared successfully. Finally, the organizing and structure of PZT thick films were characterized by means of XRD and SEM in detail.",

keywords = "MEMS, Nano-PZT, Thick films",

author = "Hongmei Liu and Chengjun Qiu and Deqing Zhang and Huijun Zhang and Maosheng Cao",

year = "2006",

month = jun,

language = "English",

volume = "16",

pages = "606--609",

journal = "Gaojishu Tongxin/High Technology Letters",

issn = "1002-0470",

publisher = "Inst. of Scientific and Technical Information of China",

number = "6",

}

TY - JOUR

T1 - Study of nano-PZT thick film for MEMS application

AU - Liu, Hongmei

AU - Qiu, Chengjun

AU - Zhang, Deqing

AU - Zhang, Huijun

AU - Cao, Maosheng

PY - 2006/6

Y1 - 2006/6

N2 - A novel spin-coating route for fabricating PZT thick films was proposed. By 0-3 composite method, PZT Sol-Gel precursor and nano-sized powders were mixed to form homogenous slurry. PZT Sol-Gel precursor and the slurry were alternately spin-coated on the Pt/Ti/SiO2/Si substrate and the crack free PZT thick films (2 μm in thickenss) wre prepared successfully. Finally, the organizing and structure of PZT thick films were characterized by means of XRD and SEM in detail.

AB - A novel spin-coating route for fabricating PZT thick films was proposed. By 0-3 composite method, PZT Sol-Gel precursor and nano-sized powders were mixed to form homogenous slurry. PZT Sol-Gel precursor and the slurry were alternately spin-coated on the Pt/Ti/SiO2/Si substrate and the crack free PZT thick films (2 μm in thickenss) wre prepared successfully. Finally, the organizing and structure of PZT thick films were characterized by means of XRD and SEM in detail.

KW - MEMS

KW - Nano-PZT

KW - Thick films

UR - http://www.scopus.com/inward/record.url?scp=33745751260&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:33745751260

SN - 1002-0470

VL - 16

SP - 606

EP - 609

JO - Gaojishu Tongxin/High Technology Letters

JF - Gaojishu Tongxin/High Technology Letters

IS - 6

ER -

Study of nano-PZT thick film for MEMS application

Abstract

Keywords

Other files and links

Fingerprint

Cite this