Study of a high-precision SAW-MOEMS strain sensor with laser optics

Xinwei Liu; Shufen Chen; Honglang Li; Zhengfeng Zou; Lei Fu; Yanbin Meng

doi:10.1088/1054-660X/25/2/025001

Study of a high-precision SAW-MOEMS strain sensor with laser optics

Xinwei Liu, Shufen Chen, Honglang Li, Zhengfeng Zou, Lei Fu, Yanbin Meng

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

Abstract

A novel structure design of a surface acoustic wave (SAW) micro-optic-electro-mechanical-system (MOEMS) strain sensor with a light readout unit is presented in this paper. By measuring the polarization intensity ratio of the TE/TM mode outputted from the waveguide, the strain produced from an object can be measured precisely. The basic working principle of the SAW MOEMS strain sensor is introduced and the mathematical model of the strain sensor system is established. The SAW characteristics effected by the strain sensor are mathematically deduced. The coupling coefficient between the SAW modes and light modes can be calculated based on the theory of coupling modes. The conversion coefficient of polarized light modes is obtained. Due to the restrictions of the specific parameters of the device, the level of technology and the material characteristics, the sensitivity of the strain sensor system is calculated through simulation as 0.1 με, with a dynamic range of 0 ∼±50 με.

Original language	English
Article number	025001
Journal	Laser Physics
Volume	25
Issue number	2
DOIs	https://doi.org/10.1088/1054-660X/25/2/025001
Publication status	Published - 1 Feb 2015

Keywords

coupling of sound and light
mode conversion
strain sensor

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10.1088/1054-660X/25/2/025001

Cite this

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title = "Study of a high-precision SAW-MOEMS strain sensor with laser optics",

abstract = "A novel structure design of a surface acoustic wave (SAW) micro-optic-electro-mechanical-system (MOEMS) strain sensor with a light readout unit is presented in this paper. By measuring the polarization intensity ratio of the TE/TM mode outputted from the waveguide, the strain produced from an object can be measured precisely. The basic working principle of the SAW MOEMS strain sensor is introduced and the mathematical model of the strain sensor system is established. The SAW characteristics effected by the strain sensor are mathematically deduced. The coupling coefficient between the SAW modes and light modes can be calculated based on the theory of coupling modes. The conversion coefficient of polarized light modes is obtained. Due to the restrictions of the specific parameters of the device, the level of technology and the material characteristics, the sensitivity of the strain sensor system is calculated through simulation as 0.1 με, with a dynamic range of 0 ∼±50 με.",

keywords = "coupling of sound and light, mode conversion, strain sensor",

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AU - Liu, Xinwei

AU - Chen, Shufen

AU - Li, Honglang

AU - Zou, Zhengfeng

AU - Fu, Lei

AU - Meng, Yanbin

PY - 2015/2/1

Y1 - 2015/2/1

N2 - A novel structure design of a surface acoustic wave (SAW) micro-optic-electro-mechanical-system (MOEMS) strain sensor with a light readout unit is presented in this paper. By measuring the polarization intensity ratio of the TE/TM mode outputted from the waveguide, the strain produced from an object can be measured precisely. The basic working principle of the SAW MOEMS strain sensor is introduced and the mathematical model of the strain sensor system is established. The SAW characteristics effected by the strain sensor are mathematically deduced. The coupling coefficient between the SAW modes and light modes can be calculated based on the theory of coupling modes. The conversion coefficient of polarized light modes is obtained. Due to the restrictions of the specific parameters of the device, the level of technology and the material characteristics, the sensitivity of the strain sensor system is calculated through simulation as 0.1 με, with a dynamic range of 0 ∼±50 με.

AB - A novel structure design of a surface acoustic wave (SAW) micro-optic-electro-mechanical-system (MOEMS) strain sensor with a light readout unit is presented in this paper. By measuring the polarization intensity ratio of the TE/TM mode outputted from the waveguide, the strain produced from an object can be measured precisely. The basic working principle of the SAW MOEMS strain sensor is introduced and the mathematical model of the strain sensor system is established. The SAW characteristics effected by the strain sensor are mathematically deduced. The coupling coefficient between the SAW modes and light modes can be calculated based on the theory of coupling modes. The conversion coefficient of polarized light modes is obtained. Due to the restrictions of the specific parameters of the device, the level of technology and the material characteristics, the sensitivity of the strain sensor system is calculated through simulation as 0.1 με, with a dynamic range of 0 ∼±50 με.

KW - coupling of sound and light

KW - mode conversion

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Study of a high-precision SAW-MOEMS strain sensor with laser optics

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Keywords

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