Structure design and simulation analysis of multiple micro piezoelectric cantilevers

Anran Jiang, Shiqiao Gao, Fenglin Yao, Yunli He

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In order to effectively capture the environment vibration energy, convert it into electricity and supply energy for the microelectronics devices, multiple micro piezoelectric cantilevers are designed. It is composed of more than one piezoelectric cantilever array, which broaden the resonant frequency band of the piezoelectric vibrator, and it can produce resonance or similar to the resonance in a frequency range. Compared to a single piezoelectric cantilever, multiple piezoelectric cantilevers can effectively broaden the resonant frequency and improve the piezoelectric power generation capacity. The simulation results show that the finite element method can provide important theoretical guidance for the structural design of multiple micro piezoelectric cantilevers.

Original languageEnglish
Title of host publicationMicro-Nano Technology XIV
PublisherTrans Tech Publications Ltd.
Pages1208-1213
Number of pages6
ISBN (Print)9783037857397
DOIs
Publication statusPublished - 2013
Event14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 - Hangzhou, China
Duration: 4 Nov 20127 Nov 2012

Publication series

NameKey Engineering Materials
Volume562-565
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012
Country/TerritoryChina
CityHangzhou
Period4/11/127/11/12

Keywords

  • Multiple
  • Piezoelectric cantilever
  • Simulation analysis
  • Structure design

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