Simulation and experimental study on the precision glass molding for microstructures on optical glass based on relaxation effect

Zhanchen Zhu, Tianfeng Zhou, Jiaqing Xie, Qian Yu, Jia Zhou, Xibin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

To manufacture high precision optical glass microstructures, finite element simulation and experiments of precision glass molding (PGM) are carried out to study the influence of relaxation effect on internal stress and deformation of the glass material. Two kinds of microstructures including microgrooves and micropyramids are fabricated by PGM. First, a two-dimensional axisymmetric finite element model of the PGM is established, and three kinds of molding schemes are put forward and analyzed, including quick molding and holding for a period of time, molding with low speed, molding by gravity. The advantages and disadvantages of the three schemes are also analyzed. Second, the microgrooves are fabricated using the scheme of molding by gravity, and then the existing problems are discussed. Finally, the micropyramids are fabricated by the low speed molding method, and the forming profiles are compared.

Original languageEnglish
Title of host publication9th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationMicro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
EditorsXiangang Luo, Mingbo Pu, Bin Fan, Reinhart Poprawe, Xiong Li, Min Gu
PublisherSPIE
ISBN (Electronic)9781510623224
DOIs
Publication statusPublished - 2019
Event9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics - Chengdu, China
Duration: 26 Jun 201829 Jun 2018

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10840
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
Country/TerritoryChina
CityChengdu
Period26/06/1829/06/18

Keywords

  • Finite element simulation
  • Microstructures
  • Optical glass
  • Precision glass molding
  • Relaxation effect

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