@inproceedings{dbba74c8bb63486eb0a2f502d2143830,
title = "Simulation and characterization of a CMOS Z-axis microactuator with electrostatic comb drives",
abstract = "This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 μm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.",
keywords = "Behavioral simulation, CMOS micromachining process, Comb drive, NODAS library, Vertical actuation",
author = "Huikai Xie and Lars Erdmann and Qi Jing and Feeder, {Gary K.}",
year = "2000",
language = "English",
isbn = "0966613570",
series = "2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000",
pages = "181--184",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000",
note = "2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 ; Conference date: 27-03-2000 Through 29-03-2000",
}