Si-Based NIR Tunneling Heterojunction Photodetector With Interfacial Engineering and 3D-Graphene Integration

Zhengyi He, Shan Zhang, Li Zheng, Zhiduo Liu, Guanglin Zhang, Huijuan Wu, Bingkun Wang, Zhongyu Liu, Zhiwen Jin, Gang Wang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

Here, we have fabricated high-performance near-infrared (NIR) tunnelling heterojunction photodetectors (THPDs) by in-situ synthesizing three-dimensional (3D) graphene on Si with the insertion of a high-κ tunnelling layer. Combining the high light-harvesting ability of 3D-graphene and the effective dark current suppression of the high-κ tunnelling layer, the trade-off between the ultrafast response and ultra-sensitivity in graphene-based PDs is successfully bridged. Our device exhibits ultra-high responsivity (11.2 A/W), excellent specific detectivity (5.9 ×10 10 Jones), and ultra-fast response (168 μs) at the communication wavelength (1550 nm). This work provides a universal strategy to fabricate high-performance and low-cost graphene/silicon PDs in the communication wavelength.

Original languageEnglish
Pages (from-to)1818-1821
Number of pages4
JournalIEEE Electron Device Letters
Volume43
Issue number11
DOIs
Publication statusPublished - 1 Nov 2022

Keywords

  • 3D-graphene
  • NIR tunnelling photodetector
  • interfacial engineering

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