Sentaurus workbench practical study of integrated circuit system in virtual manufacturing

Hua Dang; Shun An Zhong; Yue Yang Chen; Hui Jun Li; Jin Hao Wang

Sentaurus workbench practical study of integrated circuit system in virtual manufacturing

Hua Dang^*, Shun An Zhong, Yue Yang Chen, Hui Jun Li, Jin Hao Wang

^*Corresponding author for this work

School of Integrated Circuits and Electronics

Research output: Contribution to journal › Article › peer-review

Abstract

Introduced the function of design for manufacturability integration of DFM tools in Sentaurus Workbench, including the combination of experiments in DOE, model of response surface and the optimization function in process. These can be applied to design and optimize the model in Nano-level. Finally, a full flow of virtual manufacturing, a tube core of NMOS with ultra deep sub-micron in a typical small dimension, and virtual manufacturing are completed in Sentaurus Workbench, and the specific process parameters are given.

Original language	English
Pages (from-to)	8-10
Number of pages	3
Journal	Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology
Volume	28
Issue number	SUPPL.
Publication status	Published - Mar 2008

Keywords

DFM-design-for-manufacturability
Small dimension effect
System of virtual manufacturing
Very deep sub-micron
Very large scale integrated circuit

Cite this

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title = "Sentaurus workbench practical study of integrated circuit system in virtual manufacturing",

abstract = "Introduced the function of design for manufacturability integration of DFM tools in Sentaurus Workbench, including the combination of experiments in DOE, model of response surface and the optimization function in process. These can be applied to design and optimize the model in Nano-level. Finally, a full flow of virtual manufacturing, a tube core of NMOS with ultra deep sub-micron in a typical small dimension, and virtual manufacturing are completed in Sentaurus Workbench, and the specific process parameters are given.",

keywords = "DFM-design-for-manufacturability, Small dimension effect, System of virtual manufacturing, Very deep sub-micron, Very large scale integrated circuit",

author = "Hua Dang and Zhong, {Shun An} and Chen, {Yue Yang} and Li, {Hui Jun} and Wang, {Jin Hao}",

year = "2008",

month = mar,

language = "English",

volume = "28",

pages = "8--10",

journal = "Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology",

issn = "1001-0645",

publisher = "Beijing Institute of Technology",

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T1 - Sentaurus workbench practical study of integrated circuit system in virtual manufacturing

AU - Dang, Hua

AU - Zhong, Shun An

AU - Chen, Yue Yang

AU - Li, Hui Jun

AU - Wang, Jin Hao

PY - 2008/3

Y1 - 2008/3

N2 - Introduced the function of design for manufacturability integration of DFM tools in Sentaurus Workbench, including the combination of experiments in DOE, model of response surface and the optimization function in process. These can be applied to design and optimize the model in Nano-level. Finally, a full flow of virtual manufacturing, a tube core of NMOS with ultra deep sub-micron in a typical small dimension, and virtual manufacturing are completed in Sentaurus Workbench, and the specific process parameters are given.

AB - Introduced the function of design for manufacturability integration of DFM tools in Sentaurus Workbench, including the combination of experiments in DOE, model of response surface and the optimization function in process. These can be applied to design and optimize the model in Nano-level. Finally, a full flow of virtual manufacturing, a tube core of NMOS with ultra deep sub-micron in a typical small dimension, and virtual manufacturing are completed in Sentaurus Workbench, and the specific process parameters are given.

KW - DFM-design-for-manufacturability

KW - Small dimension effect

KW - System of virtual manufacturing

KW - Very deep sub-micron

KW - Very large scale integrated circuit

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M3 - Article

AN - SCOPUS:43749087322

SN - 1001-0645

VL - 28

SP - 8

EP - 10

JO - Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology

JF - Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology

IS - SUPPL.

ER -

Sentaurus workbench practical study of integrated circuit system in virtual manufacturing

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Keywords

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