Sb₂Te₃基热电薄膜的研究进展

Micro thermoelectric devices based on thermoelectric films have promising applications in various fields such as micro-zone refrigeration and power generation. Thermoelectric films with high power factor and large ZT values are critical materials in these devices. Sb₂Te₃-based materials are outstanding p-type thermoelectric materials at room temperature. However, the thermoelectric properties of Sb₂Te₃-based thin films cannot meet the requirement of practical applications. The research background of thermoelectric materials is briefly introduced, the crystal structure of Sb₂Te₃ is discussed, the preparation techniques of Sb₂Te₃-based thin films are outlined, and the methods of improving the power factor and reducing the thermal conductivity of Sb₂Te₃-based thin films are summarized. In particular, the effects of microstructure on thermoelectric properties are focused on to elucidate the mechanism of improving thermoelectric properties of the films, which includes defects, preferential orientation, nanoparticles, superlattice, organic-inorganic hybridization, and so on. In addition, the future research directions for Sb₂Te₃-based thermoelectric thin films are discussed.