Research on vibration compensation technology of pressure sensors in shock wave overpressure measurement

In the dynamic pressure test of explosion shock wave, the interference of seismic wave and mechanical shock makes the interpretation of shock wave pressure measurement more difficult. In this paper, a comparative test is designed to peel off the vibration signal, and the source of vibration in shock wave measurement and the cause of acceleration parasitic effect of pressure sensor are analyzed combined with the data; Then, according to the experimental conclusions and the working principle of the sensor, a new pressure sensor with vibration compensation function is designed; Finally, the feasibility of the new sensor structure for vibration compensation is analyzed by finite element simulation. The results show that the vast majority of vibration interference signals are output by the sensor's sensitive elements, and the new sensor with double sensitive element compensation can effectively suppress or eliminate the parasitic output caused by vibration interference. The design of the new structure sensor provides ideas for the design of vibration compensation structure of other pressure sensors, and has a certain reference value.