Research of combined triaxial high-g accelerometer

This paper shows the design of a combined triaxial high-g accelerometer. The accelerometer inherits the traditional advantages of piezoresistive sensors and reduces the interference between the coordinate axes. At first, Finite Element Analysis is carried out on the single axis high-g accelerometer chip in structure. Secondly, the overall core structure is analyzed and the result of simulation shows that the structure of combined triaxial high-g accelerometer is reasonable and can work well under high impact load. Finally, the combined triaxial high-g accelerometer is validated by high impact calibration experiment in order to get all key parameters, include range, sensitivity and so on. These data are accord with the design requirements but some problems are exposed and will be solved by improving the process technology.