Repeatability study of an electrothermally actuated micromirror

Sagnik Pal; Huikai Xie

doi:10.1109/IRPS.2009.5173309

Repeatability study of an electrothermally actuated micromirror

Sagnik Pal^*, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

15 Citations (Scopus)

Abstract

With their large scan range and low drive voltages, electrothermally- actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror. The upper limit of the actuation voltage that does not degrade the embedded heater performance has been established.

Original language	English
Title of host publication	2009 IEEE International Reliability Physics Symposium, IRPS 2009
Pages	549-556
Number of pages	8
DOIs	https://doi.org/10.1109/IRPS.2009.5173309
Publication status	Published - 2009
Externally published	Yes
Event	2009 IEEE International Reliability Physics Symposium, IRPS 2009 - Montreal, QC, Canada Duration: 26 Apr 2009 → 30 Apr 2009

Publication series

Name	IEEE International Reliability Physics Symposium Proceedings
ISSN (Print)	1541-7026

Conference

Conference	2009 IEEE International Reliability Physics Symposium, IRPS 2009
Country/Territory	Canada
City	Montreal, QC
Period	26/04/09 → 30/04/09

Keywords

Bimorph
Burn-in
Electrothermal
MEMS
Microelectromechanical devices
Micromirrors
Reliability
Repeatability

Access to Document

10.1109/IRPS.2009.5173309

Cite this

Pal, S., & Xie, H. (2009). Repeatability study of an electrothermally actuated micromirror. In 2009 IEEE International Reliability Physics Symposium, IRPS 2009 (pp. 549-556). Article 5173309 (IEEE International Reliability Physics Symposium Proceedings). https://doi.org/10.1109/IRPS.2009.5173309

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title = "Repeatability study of an electrothermally actuated micromirror",

abstract = "With their large scan range and low drive voltages, electrothermally- actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror. The upper limit of the actuation voltage that does not degrade the embedded heater performance has been established.",

keywords = "Bimorph, Burn-in, Electrothermal, MEMS, Microelectromechanical devices, Micromirrors, Reliability, Repeatability",

author = "Sagnik Pal and Huikai Xie",

year = "2009",

doi = "10.1109/IRPS.2009.5173309",

language = "English",

isbn = "0780388038",

series = "IEEE International Reliability Physics Symposium Proceedings",

pages = "549--556",

booktitle = "2009 IEEE International Reliability Physics Symposium, IRPS 2009",

note = "2009 IEEE International Reliability Physics Symposium, IRPS 2009 ; Conference date: 26-04-2009 Through 30-04-2009",

}

Pal, S & Xie, H 2009, Repeatability study of an electrothermally actuated micromirror. in 2009 IEEE International Reliability Physics Symposium, IRPS 2009., 5173309, IEEE International Reliability Physics Symposium Proceedings, pp. 549-556, 2009 IEEE International Reliability Physics Symposium, IRPS 2009, Montreal, QC, Canada, 26/04/09. https://doi.org/10.1109/IRPS.2009.5173309

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AU - Xie, Huikai

PY - 2009

Y1 - 2009

N2 - With their large scan range and low drive voltages, electrothermally- actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror. The upper limit of the actuation voltage that does not degrade the embedded heater performance has been established.

AB - With their large scan range and low drive voltages, electrothermally- actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror. The upper limit of the actuation voltage that does not degrade the embedded heater performance has been established.

KW - Bimorph

KW - Burn-in

KW - Electrothermal

KW - MEMS

KW - Microelectromechanical devices

KW - Micromirrors

KW - Reliability

KW - Repeatability

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DO - 10.1109/IRPS.2009.5173309

M3 - Conference contribution

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SN - 0780388038

SN - 9780780388031

T3 - IEEE International Reliability Physics Symposium Proceedings

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BT - 2009 IEEE International Reliability Physics Symposium, IRPS 2009

T2 - 2009 IEEE International Reliability Physics Symposium, IRPS 2009

Y2 - 26 April 2009 through 30 April 2009

ER -

Repeatability study of an electrothermally actuated micromirror

Abstract

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Keywords

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