Repairing damage on ground fused silica by CO2 laser irradiation

Peng Yao; Takuro Abe; Nobuhito Yoshihara; Tianfeng Zhou; Jiwang Yan; Tsunemoto Kuriyagawa

doi:10.4028/www.scientific.net/AMR.126-128.401

Repairing damage on ground fused silica by CO₂ laser irradiation

Peng Yao^*, Takuro Abe, Nobuhito Yoshihara, Tianfeng Zhou, Jiwang Yan, Tsunemoto Kuriyagawa

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Citations (Scopus)

Abstract

Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO₂ laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness

Original language	English
Title of host publication	Advances in Abrasive Technology XIII
Pages	401-406
Number of pages	6
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.126-128.401
Publication status	Published - 2010
Externally published	Yes
Event	13th International Symposium on Advances in Abrasive Technology, ISAAT2010 - Taipei, Taiwan, Province of China Duration: 19 Sept 2010 → 22 Sept 2010

Publication series

Name	Advanced Materials Research
Volume	126-128
ISSN (Print)	1022-6680

Conference

Conference	13th International Symposium on Advances in Abrasive Technology, ISAAT2010
Country/Territory	Taiwan, Province of China
City	Taipei
Period	19/09/10 → 22/09/10

Keywords

Brittle mode
CO laser irradiation
Ductile mode
Fused silica
Subsurface damage

Access to Document

10.4028/www.scientific.net/AMR.126-128.401

Cite this

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title = "Repairing damage on ground fused silica by CO2 laser irradiation",

abstract = "Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness",

keywords = "Brittle mode, CO laser irradiation, Ductile mode, Fused silica, Subsurface damage",

author = "Peng Yao and Takuro Abe and Nobuhito Yoshihara and Tianfeng Zhou and Jiwang Yan and Tsunemoto Kuriyagawa",

year = "2010",

doi = "10.4028/www.scientific.net/AMR.126-128.401",

language = "English",

isbn = "9780878492428",

series = "Advanced Materials Research",

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booktitle = "Advances in Abrasive Technology XIII",

note = "13th International Symposium on Advances in Abrasive Technology, ISAAT2010 ; Conference date: 19-09-2010 Through 22-09-2010",

}

Yao, P, Abe, T, Yoshihara, N, Zhou, T, Yan, J & Kuriyagawa, T 2010, Repairing damage on ground fused silica by CO₂ laser irradiation. in Advances in Abrasive Technology XIII. Advanced Materials Research, vol. 126-128, pp. 401-406, 13th International Symposium on Advances in Abrasive Technology, ISAAT2010, Taipei, Taiwan, Province of China, 19/09/10. https://doi.org/10.4028/www.scientific.net/AMR.126-128.401

TY - GEN

T1 - Repairing damage on ground fused silica by CO2 laser irradiation

AU - Yao, Peng

AU - Abe, Takuro

AU - Yoshihara, Nobuhito

AU - Zhou, Tianfeng

AU - Yan, Jiwang

AU - Kuriyagawa, Tsunemoto

PY - 2010

Y1 - 2010

N2 - Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness

AB - Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness

KW - Brittle mode

KW - CO laser irradiation

KW - Ductile mode

KW - Fused silica

KW - Subsurface damage

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