Rapid preparation of amorphous Al2O3on graphene surface by plasma electrolysis technology

Yongfu Zhang, Yunjie Yang, Xiaolin Wei, Ben Ma, Weiwei Chen*, Huanwu Cheng, Lu Wang, Tianyu Hou, Maoyuan Li, Lin Lu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Difficult processing, easy agglomeration, and other issues make it difficult for graphene to be used in product design alone. Surface modification of graphene is the key to solving the problem. However, the disadvantage that graphene cannot be used as an electrode independently limits its study. Amorphous Al2O3-coated graphene was synthesized by plasma electrolysis in this study. The coating was composed of γ-Al2O3, Al2OC, and Al4C3 with a thickness of ∼7 nm. The unclear interface between the coating and the substrate demonstrated a good combination between the coating and the graphene. A weightlessness rate of only 1.9% before 600 °C, increasing five times while compared to the original sample, revealed excellent oxidation resistance of coating on the graphene. The mechanism of the coating onto the graphene was also studied for further investigation. We believe that the technique could optimize the application and development of graphene.

Original languageEnglish
Article number013601
JournalJournal of Vacuum Science and Technology B
Volume40
Issue number1
DOIs
Publication statusPublished - 1 Jan 2022

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